Nkhani Zamakampani: PVA TePla ndi Fraunhofer IISB akhazikitsa Joint Lab ya zinthu zopangidwa ndi aluminiyamu ndi nitride

Kampani ya Fraunhofer IISB (Institute for Integrated Systems and Device Technology) yokhala ku Erlangen ndi kampani yopanga makina a microwave & radio frequency plasma system PVA TePla AG yokhala ku Wettenberg ikugwiritsa ntchito ukadaulo wawo mu Joint Lab popanga makristalo a aluminium nitride (AlN).

Monga kampani yoyamba ku Europe, mgwirizanowu umalola kuti pakhale kupanga zinthu zazing'ono zopangidwa ndi ma monocrystalline AlN substrates okhala ndi mainchesi awiri m'mimba mwake kuti zigwiritsidwe ntchito pa kafukufuku ndi chitukuko. Izi zimathandizira kwambiri kupezeka kwa zinthu zopangidwa ndi AlN ku Europe, zomwe zimathandizira chitukuko cha zipangizo ndi machitidwe ozikidwa pa AlN komanso kusintha kwawo kukhala mafakitale.

Aluminium nitride ndi imodzi mwa zipangizo zabwino kwambiri pa mbadwo wotsatira wa zamagetsi ogwira ntchito bwino. Monga semiconductor ya ultrawide-bandgap (UWBG), AlN ikutsegula mwayi watsopano mu photonics, zamagetsi zamagetsi, zamagetsi zamagetsi zama frequency apamwamba, ndi zamagetsi zomwe zikugwira ntchito pansi pa mikhalidwe yovuta kwambiri. Mpaka pano, kusowa kwa zinthu zapamwamba za AlN zapamwamba, zazikulu komanso zotsika mtengo kwalepheretsa chitukuko cha machitidwe amagetsi ozikidwa pa AlN.

"Ndi Joint Lab, tikukhazikitsa maziko otsimikizira kuti pali zinthu zodalirika za AlN kuchokera ku Europe, motero tikutsegula mwayi watsopano wa mibadwo yotsatira ya zida za AlN zogwira ntchito bwino," akutero Dr. Sven Besendörfer, mtsogoleri wa gulu la zida za nitride komanso woyang'anira chitukuko cha zida za AlN ku Fraunhofer IISB. "Pamodzi ndi PVA TePla, tikupereka luso lathu pakukula kwa makristalo a mafakitale, motero tikupanga zofunikira kuti ntchito zogwiritsidwa ntchito zikhale zokhazikika."

Ukadaulo wotsimikizika wa zida umagwirizana ndi luso lapadera la njira zogwirira ntchito

Mu labu yolumikizirana, Fraunhofer IISB ikugwiritsa ntchito ukadaulo wake wa PVT (physical vapor transport) kuti ipange makristalo a AlN a mainchesi 2. Munjira iyi, ufa wa AlN umatenthedwa mu crucible pa kutentha kopitilira 2000°C ndikuyikidwa pa kristalo wa mbewu. PVA TePla imapereka makina a PVT pachifukwa ichi, omwe akugwiritsidwa kale ntchito padziko lonse lapansi pa makristalo a silicon carbide (SiC) a mainchesi 8 ndipo tsopano asinthidwa mwapadera kuti akule makristalo a AlN a mainchesi 2.

Chifukwa cha ukatswiri wa Fraunhofer IISB pa ntchito yokonza zinthu, gulu la PVA TePla linatha kupanga makhiristo a AlN apamwamba kwambiri m'malo akeake. Joint Lab imayang'ana kwambiri pakupanga makhiristo ang'onoang'ono a AlN a mainchesi awiri. Kupanga tsopano kukuwonjezeka pang'onopang'ono kuti kukhazikike bwino kwa njira yokonza zinthu, kuberekanso, kupanga zipatso ndi mitengo.

“Ndi aluminiyamu nitride, tikupanga mbadwo wotsatira wa ukadaulo wotsatira SiC,” akutero Dr Jan Pfeiffer, wachiwiri kwa purezidenti wa kafukufuku ndi chitukuko ku PVA TePla. “Kudzera mu Joint Lab, titha kuphatikiza mwachindunji ukatswiri wathu wa zida ndi luso la Fraunhofer IISB, zomwe zimatithandiza kupereka mayankho okhudzana ndi msika kwa makasitomala athu apadziko lonse lapansi pachiyambi,” akuwonjezera. “Cholinga chathu chofanana ndikulimbikitsa chitukuko cha msika mu gawo la AlN kudzera m'magawo oyenera ndikuthandizira makampani omwe akufuna kulowa mu gawoli ngati ukadaulo wogwirizana ndi zida zoyenera komanso ukatswiri wogwirizana ndi njira.”

Kulimbitsa ulamuliro wa ukadaulo wa ku Ulaya kudzera mu kukula kwa mafakitale

Makristalo a AlN opangidwa mu Joint Lab amakonzedwanso ku Fraunhofer IISB kukhala ma substrate a AlN okonzeka ndi epi ndipo, kudzera mu kampani yofufuza ndi kupanga zinthu ku Erlangen LZE GmbH, makamaka amasamutsidwa kupita ku njira zopititsira patsogolo mafakitale ndi kukula. "Kuti pakhale ulamuliro wa semiconductor ku Europe, ndikofunikira kuti zipangizo zatsopano zisamapangidwe zokha komanso zisinthidwe mwachangu ku ntchito zamafakitale ndikupanga phindu lowonjezereka," akutero mkulu wa LZE Dr Christian Forster. "Ndi msika wake waukadaulo wapamwamba, LZE GmbH imapatsa makampani ndi mabungwe ofufuza mwayi wapadera padziko lonse lapansi wopeza ma substrate a AlN. Mwanjira imeneyi, timathandiza kuonetsetsa kuti ntchito zabwino zamisika yamafakitale yambiri zimabweretsedwa pamsika mwachangu."